Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid

Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Suspended bimaterial microchannel resonator devices have been fabricated to measure the thermal behaviors of small biological molecules and individual cells in liquid. A resonant microbridge structure embeds this microfluidic channel in its interior. The fabrication process is based on the creation of buried channels in silicon-on-insulator wafers. For the bimaterial bridge structure layers of SiO2 and SiNx were used. This bimaterial resonant bridge with internal microfluidic channel could be employed as a very sensitive calorimeter, since the tensile stress generated by bimaterial effect in the heated bridge, produces a shift of resonant frequency. A laser beam was used to heat the center of the bridge resonator with the microchannel filled by water and the corresponding resonant frequency variations were evaluated. The measured sensitivity for the local heat at the center of the bridge is 8.6 ppm/μW in atmospheric condition.

Original languageEnglish
Pages (from-to)1049-1054
Number of pages6
JournalMicrosystem Technologies
Volume19
Issue number7
DOIs
Publication statusPublished - 2013 Jul 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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