Surface texturing of TiO2 film by mist deposition of TiO2 nanoparticles

Gang Qin, Akira Watanabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Unique and various microstructures of titanium oxide (TiO2) film including macroporous structure, chromatic veins and rings, have been easily fabricated by mist deposition method on silicon substrate with mild preparation conditions. Rutile phase TiO2 nanoparticles were directly used as starting material to prepare film and led to a simple preparation process. It was found that several different microstructures existed in the sample and changed with the varied positions from the center to the edge of the film when the concentration of the TiO2 suspension is 0.06 mol/l, the deposition time is 30 min, the flow rate is 1 l/min and the temperature is 150°C. The surface texturing shows apparent distinction as the concentration of the TiO2 suspension decreased to 0.03 mol/l and 0.01 mol/l.

Original languageEnglish
Pages (from-to)129-134
Number of pages6
JournalNano-Micro Letters
Volume5
Issue number2
DOIs
Publication statusPublished - 2013

Keywords

  • Microstructure
  • Mist deposition
  • Surface texturing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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