Surface-sensitive x-ray fluorescence analysis at glancing incident and takeoff angles

Kouichi Tsuji, Shigeo Sato, Kichinosuke Hirokawa

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

The possibility of the glancing incidence and takeoff x-ray fluorescence (GIT-XRF) method for surface analysis has been investigated. In this method the observation depth can be restricted by both the incident angle of primary x rays and the takeoff angle of observed fluorescent x rays. As a result, it has been found that the surface-sensitive analysis is achieved when the incident angle is small below the critical angle for total reflection of the primary x rays and the takeoff angle is set slightly below the critical angle for total reflection of the fluorescent x rays from the element on the substrate.

Original languageEnglish
Pages (from-to)7860-7863
Number of pages4
JournalJournal of Applied Physics
Volume76
Issue number12
DOIs
Publication statusPublished - 1994 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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