The possibility of the glancing incidence and takeoff x-ray fluorescence (GIT-XRF) method for surface analysis has been investigated. In this method the observation depth can be restricted by both the incident angle of primary x rays and the takeoff angle of observed fluorescent x rays. As a result, it has been found that the surface-sensitive analysis is achieved when the incident angle is small below the critical angle for total reflection of the primary x rays and the takeoff angle is set slightly below the critical angle for total reflection of the fluorescent x rays from the element on the substrate.
ASJC Scopus subject areas
- Physics and Astronomy(all)