Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine

Wei Gao, Jun Aoki, Bing Feng Ju, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

59 Citations (Scopus)

Abstract

This paper describes the surface profile measurement of a XY-grid workpiece with sinusoidal microstructures using an atomic force microscope (AFM) on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on an aluminum plate by fast tool servo-assisted diamond turning, are a superposition of periodic sine-waves along the X- and Y-directions (wavelength (XY): 150 μm, amplitude (Z): 0.25 μm). A linear encoder with a resolution of 0.5 nm is integrated into the AFM-head for accurate measurement of the Z-directional profile height in the presence of noise associated with the diamond turning machine. The spindle and the X-slide of the machine are employed to spirally scan the AFM-head over the sinusoidal grid workpiece. Experiments fabricating and measuring the sinusoidal grid workpiece are carried out after accurate alignment of the AFM cantilever tip with the spindle centerline.

Original languageEnglish
Pages (from-to)304-309
Number of pages6
JournalPrecision Engineering
Volume31
Issue number3
DOIs
Publication statusPublished - 2007 Jul

Keywords

  • Atomic force microscope
  • Diamond turning machine
  • Linear encoder
  • Measurement
  • Sinusoidal grid
  • Surface profile

ASJC Scopus subject areas

  • Engineering(all)

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