Surface Photo Voltage (SPV) Type NO, NO2 Gas Sensor Fabricated by Mesoporous Materials with Uniform Pore Size and Ordered Pore Structure

Takeo Yamada, Hao Shen Zhou, Itaru Homma, Masato Tomita, Yuko Ueno, Hidekazu Uchida, Teruaki Katsube

Research output: Contribution to journalArticlepeer-review

Abstract

The mesoporous materials SBA-15 and SBA-16 from the self-assembled template organic framework inorganic compound materials are successfully prepared with powder and film states. The powder state of mesoporous material exhibit a variety of properties and possibilities of these kinds of materials. The film state of these SBA-15 and SBA-16 are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO and NO2 gas sensing properties dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application. Keywords: mesoporous silicate, SBA-15, SBA-16, NO, NO2, gas sensor, Surface Photo Voltage.

Original languageEnglish
Pages (from-to)118-123
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume123
Issue number4
DOIs
Publication statusPublished - 2003 Jan 1
Externally publishedYes

Keywords

  • NO
  • NO2
  • SBA-15
  • SBA-16
  • Surface Photo Voltage
  • gas sensor
  • mesoporous silicate

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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