Surface micro-structuring of titanium oxide crystal and metals using femtosecond laser ablation

K. Furusawa, K. Takahashi, H. Kumagai, K. Midorikawa, M. Obara

Research output: Contribution to journalConference articlepeer-review

Abstract

The ablation characteristics and the results of microstructuring to titanium oxide rutile crystal ad metal crystals (Au, Ag, Cu) were investigated using an ultrashort pulsed titanium sapphire laser based chirped pulse amplification system with a repetition rate of 1 kHz. Pulse width was continuously varied from 100 fs to 1 ps by adjusting the pulse compressor grating pair of the system. The laser beam was attenuated by optical filters and focused onto the target placed in the vacuum chamber, by taking account of the group delay dispersion of the lens and the filters. The morphology of the ablated surface in terms of depth and beam diameter was observed by FE-SEM.

Original languageEnglish
Pages (from-to)635-636
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume2
Publication statusPublished - 1999 Dec 1
EventProceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA
Duration: 1999 Nov 81999 Nov 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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