Surface form metrology of micro-optics

Bin Xu, Zhigang Jia, Xinghui Li, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.

Original languageEnglish
Title of host publicationInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
DOIs
Publication statusPublished - 2013 Aug 15
EventInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore
Duration: 2013 Apr 92013 Apr 11

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8769
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
CountrySingapore
CitySingapore
Period13/4/913/4/11

Keywords

  • Diffractive micro-optics
  • Metrology
  • Micro-optics
  • Optical evaluation system
  • Refractive micro-optics
  • Scanning probe microscope
  • Stylus profiling system
  • Surface form

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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