Surface encoders for a mosaic scale grating

Koji Hosono, Woo Jae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder's measurement range in plane - in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations' effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.

Original languageEnglish
Pages (from-to)91-96
Number of pages6
JournalInternational Journal of Automation Technology
Volume5
Issue number2
DOIs
Publication statusPublished - 2011 Mar

Keywords

  • Mosaic grating
  • Multiprobe
  • Sensor
  • Surface encoder

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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