TY - JOUR
T1 - Surface coating technology for biomaterials-morphology and nano-structure control
AU - Goto, Takashi
N1 - Funding Information:
This research is partially supported by the Nano-coating Project sponsored by the New Energy and Industrial Technology Development Organization (NEDO), Japan.
PY - 2005/9
Y1 - 2005/9
N2 - Thin film coatings have been widely employed, particularly in the semiconductor industry; however, thick oxide coatings also have promising applications including biomaterial coatings. High-speed deposition processes, commonly plasma spray or electron beam physical vapor deposition, have been utilized for thick coatings, whereas another deposition route has been pursued to obtain high-performance thick coatings. This paper introduces a new high-speed deposition process, laser chemical vapor deposition (LCVD), for thick coatings and its versatility of morphology and nano-structure control are advantageous to adherence of ceramic coatings to metal substrates. LCVD has achieved extremely high deposition rates ranging from 100 to 3000 μm/h for various oxide coatings such as ZrO2, Y2O3, Al2O3 and TiO2. Excellent adherence can be developed by columnar texture containing a large amount of nano-pores in the grain of oxide coatings.
AB - Thin film coatings have been widely employed, particularly in the semiconductor industry; however, thick oxide coatings also have promising applications including biomaterial coatings. High-speed deposition processes, commonly plasma spray or electron beam physical vapor deposition, have been utilized for thick coatings, whereas another deposition route has been pursued to obtain high-performance thick coatings. This paper introduces a new high-speed deposition process, laser chemical vapor deposition (LCVD), for thick coatings and its versatility of morphology and nano-structure control are advantageous to adherence of ceramic coatings to metal substrates. LCVD has achieved extremely high deposition rates ranging from 100 to 3000 μm/h for various oxide coatings such as ZrO2, Y2O3, Al2O3 and TiO2. Excellent adherence can be developed by columnar texture containing a large amount of nano-pores in the grain of oxide coatings.
KW - Columnar texture
KW - Laser chemical vapor deposition
KW - Morphology
KW - Nano-pore
KW - Nano-structure
KW - Oxide coating
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U2 - 10.1016/j.ics.2005.06.007
DO - 10.1016/j.ics.2005.06.007
M3 - Article
AN - SCOPUS:33747628095
VL - 1284
SP - 248
EP - 256
JO - International Congress Series
JF - International Congress Series
SN - 0531-5131
ER -