Surface characterization of a diamond turned XY sinusoidal grating

Yuki Shimizu, S. Osawa, T. Meguro, W. Lu, I Ko

Research output: Contribution to journalConference article

Abstract

Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.

Original languageEnglish
Pages (from-to)337-342
Number of pages6
JournalProcedia Engineering
Volume19
DOIs
Publication statusPublished - 2011 Jan 1
Event1st CIRP Conference on Surface Integrity, CSI 2012 - Bremen, Germany
Duration: 2012 Jan 302012 Feb 1

Keywords

  • Accuracy
  • Metrology
  • Sinusoidal grating
  • Topography

ASJC Scopus subject areas

  • Engineering(all)

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