Surface characterization of a diamond turned XY sinusoidal grating

Y. Shimizu; S. Osawa; T. Meguro; W. Lu; W. Gao

doi:10.1016/j.proeng.2011.11.122

Surface characterization of a diamond turned XY sinusoidal grating

Y. Shimizu, S. Osawa, T. Meguro, W. Lu, W. Gao

ENG - Finemechanics

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.

Original language	English
Pages (from-to)	337-342
Number of pages	6
Journal	Procedia Engineering
Volume	19
DOIs	https://doi.org/10.1016/j.proeng.2011.11.122
Publication status	Published - 2011
Event	1st CIRP Conference on Surface Integrity, CSI 2012 - Bremen, Germany Duration: 2012 Jan 30 → 2012 Feb 1

Keywords

Accuracy
Metrology
Sinusoidal grating
Topography

ASJC Scopus subject areas

Engineering(all)

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10.1016/j.proeng.2011.11.122

Cite this

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title = "Surface characterization of a diamond turned XY sinusoidal grating",

abstract = "Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.",

keywords = "Accuracy, Metrology, Sinusoidal grating, Topography",

author = "Y. Shimizu and S. Osawa and T. Meguro and W. Lu and W. Gao",

year = "2011",

doi = "10.1016/j.proeng.2011.11.122",

language = "English",

volume = "19",

pages = "337--342",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier BV",

note = "1st CIRP Conference on Surface Integrity, CSI 2012 ; Conference date: 30-01-2012 Through 01-02-2012",

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TY - JOUR

T1 - Surface characterization of a diamond turned XY sinusoidal grating

AU - Shimizu, Y.

AU - Osawa, S.

AU - Meguro, T.

AU - Lu, W.

AU - Gao, W.

PY - 2011

Y1 - 2011

N2 - Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.

AB - Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.

KW - Accuracy

KW - Metrology

KW - Sinusoidal grating

KW - Topography

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U2 - 10.1016/j.proeng.2011.11.122

DO - 10.1016/j.proeng.2011.11.122

M3 - Conference article

AN - SCOPUS:83755183206

VL - 19

SP - 337

EP - 342

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

T2 - 1st CIRP Conference on Surface Integrity, CSI 2012

Y2 - 30 January 2012 through 1 February 2012

ER -

Surface characterization of a diamond turned XY sinusoidal grating

Abstract

Keywords

ASJC Scopus subject areas

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