Substrates for surface acoustic wave (SAW) devices having various characteristics are realized by combining piezoelectric zinc oxide (ZnO) film and various substrates. This paper reports the following results: (1) the author realized Rayleigh SAW substrates having an appropriate electromechanical coupling factor (ks2 = 0.01 - seven times that of ST-cut X-propagation quartz), a good temperature coefficient of frequency (TCF≈1 ppm/°C), and a zero power flow angle by combining ZnO film and an ST-cut 35° X-propagation quartz substrate, and (2) the author realized a high mode of leaky SAW substrates having a high velocity and a good TCF (≈1 ppm/°C) by combining the ZnO film and an ST-cut 90° X-propagation quartz substrate.
|Number of pages||9|
|Journal||Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)|
|Publication status||Published - 2000 Oct|
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Computer Networks and Communications
- Electrical and Electronic Engineering