TY - JOUR
T1 - Surface acoustic wave properties of amorphous Ta 2O 5 and Nb 2O 5 thin films prepared by radio frequency sputtering
AU - Kakio, Shoji
AU - Hosaka, Keiko
AU - Arakawa, Mototaka
AU - Ohashi, Yuji
AU - Kushibiki, Jun Ichi
PY - 2012/7
Y1 - 2012/7
N2 - The fundamental acoustic properties of amorphous Ta 2O 5 and Nb 2O 5 thin films prepared by RF sputtering were evaluated using a Rayleigh-type surface acoustic wave (SAW) on 128° YX-LiNbO 3 and a shear-horizontal-type SAW on 36° YX-LiTaO 3. The elastic constants c 11 and c 44 of the thin films were determined from the measured phase velocities of two SAW modes with mutually perpendicular particle motion. Although the elastic constants of the Ta 2O 5 thin film were found to be approximately 14-17% larger than those of the Nb 2O 5 thin film, it was clarified that the Ta 2O 5 thin film has a stronger SAW trapping effect than the Nb 2O 5 thin film because the density of the former was measured to be 1.5 times higher than that of the latter. On the other hand, the Nb 2O 5 thin film has a smaller propagation loss for a Rayleigh-type SAW, a lower temperature coefficient of delay, and a higher refractive index than the Ta 2O 5 thin film.
AB - The fundamental acoustic properties of amorphous Ta 2O 5 and Nb 2O 5 thin films prepared by RF sputtering were evaluated using a Rayleigh-type surface acoustic wave (SAW) on 128° YX-LiNbO 3 and a shear-horizontal-type SAW on 36° YX-LiTaO 3. The elastic constants c 11 and c 44 of the thin films were determined from the measured phase velocities of two SAW modes with mutually perpendicular particle motion. Although the elastic constants of the Ta 2O 5 thin film were found to be approximately 14-17% larger than those of the Nb 2O 5 thin film, it was clarified that the Ta 2O 5 thin film has a stronger SAW trapping effect than the Nb 2O 5 thin film because the density of the former was measured to be 1.5 times higher than that of the latter. On the other hand, the Nb 2O 5 thin film has a smaller propagation loss for a Rayleigh-type SAW, a lower temperature coefficient of delay, and a higher refractive index than the Ta 2O 5 thin film.
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U2 - 10.1143/JJAP.51.07GA01
DO - 10.1143/JJAP.51.07GA01
M3 - Article
AN - SCOPUS:84864692214
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART2
M1 - 07GA01
ER -