Surface acoustic wave filter in high frequency with narrow bandwidth and excellent property

Michio Kadota; Takeshi Nakao; Takaki Murata; Kenji Matsuda

doi:10.1109/ULTSYM.2008.0386

Surface acoustic wave filter in high frequency with narrow bandwidth and excellent property

Michio Kadota, Takeshi Nakao, Takaki Murata, Kenji Matsuda

ENG - Robotics

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

Radio frequency (RF) filters in high frequency surface acoustic wave (SAW) such as MediaFLO^TM, Division Synchronous Code Division Multiple Access (TDSCDMA) China handy phone system, and global positioning (GPS) in cars require a narrow bandwidth. So, the substrates for their RF filters are also required to have very excellent temperature coefficient of frequency (TCF) and electro-mechanical coupling factor. Rayleigh wave on ZnO film/Al-electrode/ quartz structures and shear horizontal (SH) type of leaky SAW (LSAW) on a flattened SiO₂/high metal electrodes/36°-48°YX-LiTaOSiO ₃ one have good TCF suitable coupling factor to realize them. On the other , large reflection coefficient is required to realize the multimode filter. Though the latter has the large reflection , the farmer has small one. So, in the case of the former , authors also attempted to apply a high density metal such as Au electrode instead of Al electrode to realize large reflection coefficient. As the result, the multi-mode filters composed of a ZnO/high density electrode/quartz a flattened SiO₂/high density electrode/LiTaO3 with good for the RF range have been realized for the first time.

Original language	English
Article number	4803207
Pages (from-to)	1584-1587
Number of pages	4
Journal	Proceedings - IEEE Ultrasonics Symposium
DOIs	https://doi.org/10.1109/ULTSYM.2008.0386
Publication status	Published - 2008 Dec 1
Event	2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China Duration: 2008 Nov 2 → 2008 Nov 5

Keywords

High density electrode
LT
Quartz
RF filter
SiO
ZnO

ASJC Scopus subject areas

Acoustics and Ultrasonics

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10.1109/ULTSYM.2008.0386

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title = "Surface acoustic wave filter in high frequency with narrow bandwidth and excellent property",

abstract = "Radio frequency (RF) filters in high frequency surface acoustic wave (SAW) such as MediaFLOTM, Division Synchronous Code Division Multiple Access (TDSCDMA) China handy phone system, and global positioning (GPS) in cars require a narrow bandwidth. So, the substrates for their RF filters are also required to have very excellent temperature coefficient of frequency (TCF) and electro-mechanical coupling factor. Rayleigh wave on ZnO film/Al-electrode/ quartz structures and shear horizontal (SH) type of leaky SAW (LSAW) on a flattened SiO2/high metal electrodes/36°-48°YX-LiTaOSiO 3 one have good TCF suitable coupling factor to realize them. On the other , large reflection coefficient is required to realize the multimode filter. Though the latter has the large reflection , the farmer has small one. So, in the case of the former , authors also attempted to apply a high density metal such as Au electrode instead of Al electrode to realize large reflection coefficient. As the result, the multi-mode filters composed of a ZnO/high density electrode/quartz a flattened SiO2/high density electrode/LiTaO3 with good for the RF range have been realized for the first time.",

keywords = "High density electrode, LT, Quartz, RF filter, SiO, ZnO",

author = "Michio Kadota and Takeshi Nakao and Takaki Murata and Kenji Matsuda",

year = "2008",

month = dec,

day = "1",

doi = "10.1109/ULTSYM.2008.0386",

language = "English",

pages = "1584--1587",

journal = "Proceedings - IEEE Ultrasonics Symposium",

issn = "1051-0117",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2008 IEEE International Ultrasonics Symposium, IUS 2008 ; Conference date: 02-11-2008 Through 05-11-2008",

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TY - JOUR

T1 - Surface acoustic wave filter in high frequency with narrow bandwidth and excellent property

AU - Kadota, Michio

AU - Nakao, Takeshi

AU - Murata, Takaki

AU - Matsuda, Kenji

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Radio frequency (RF) filters in high frequency surface acoustic wave (SAW) such as MediaFLOTM, Division Synchronous Code Division Multiple Access (TDSCDMA) China handy phone system, and global positioning (GPS) in cars require a narrow bandwidth. So, the substrates for their RF filters are also required to have very excellent temperature coefficient of frequency (TCF) and electro-mechanical coupling factor. Rayleigh wave on ZnO film/Al-electrode/ quartz structures and shear horizontal (SH) type of leaky SAW (LSAW) on a flattened SiO2/high metal electrodes/36°-48°YX-LiTaOSiO 3 one have good TCF suitable coupling factor to realize them. On the other , large reflection coefficient is required to realize the multimode filter. Though the latter has the large reflection , the farmer has small one. So, in the case of the former , authors also attempted to apply a high density metal such as Au electrode instead of Al electrode to realize large reflection coefficient. As the result, the multi-mode filters composed of a ZnO/high density electrode/quartz a flattened SiO2/high density electrode/LiTaO3 with good for the RF range have been realized for the first time.

AB - Radio frequency (RF) filters in high frequency surface acoustic wave (SAW) such as MediaFLOTM, Division Synchronous Code Division Multiple Access (TDSCDMA) China handy phone system, and global positioning (GPS) in cars require a narrow bandwidth. So, the substrates for their RF filters are also required to have very excellent temperature coefficient of frequency (TCF) and electro-mechanical coupling factor. Rayleigh wave on ZnO film/Al-electrode/ quartz structures and shear horizontal (SH) type of leaky SAW (LSAW) on a flattened SiO2/high metal electrodes/36°-48°YX-LiTaOSiO 3 one have good TCF suitable coupling factor to realize them. On the other , large reflection coefficient is required to realize the multimode filter. Though the latter has the large reflection , the farmer has small one. So, in the case of the former , authors also attempted to apply a high density metal such as Au electrode instead of Al electrode to realize large reflection coefficient. As the result, the multi-mode filters composed of a ZnO/high density electrode/quartz a flattened SiO2/high density electrode/LiTaO3 with good for the RF range have been realized for the first time.

KW - High density electrode

KW - LT

KW - Quartz

KW - RF filter

KW - SiO

KW - ZnO

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T2 - 2008 IEEE International Ultrasonics Symposium, IUS 2008

Y2 - 2 November 2008 through 5 November 2008

ER -

Surface acoustic wave filter in high frequency with narrow bandwidth and excellent property

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Keywords

ASJC Scopus subject areas

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