Surface-acoustic-wave driven point source atomizer integrated with picoliter micro pumps for polymeric nanoparticles synthesis

Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Atsushi Yabe, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we report a surface acoustic wave (SAW) driven atomizer for polymeric nanoparticles synthesis based on evaporation-induced self-assembly (EISA). The atomizer consisted of a pair of arc-shaped interdigital transducer (AS-IDT) was designed for converging the SAW into a solvent. The atomizer can generate a point-source narrow mist spray and is very useful to improve the yield of nanoparticle synthesis. As a result of atomizing test with water, we succeeded in an ejection of narrow mist spray from a point on the substrate. The spray was 0.7 mm in width in the vicinity of the substrate, and kept less than 1 mm in width up to 8 mm in height. Also, the atomizer was integrated with SAW driven micro pumps to supply an appropriate amount of liquid at the mist spray ejection point. Using this pump, the discharge of water controlled in picoliter order was achieved.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1043-1046
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Sugimoto, S., Hara, M., Oguchi, H., Yabe, A., & Kuwano, H. (2014). Surface-acoustic-wave driven point source atomizer integrated with picoliter micro pumps for polymeric nanoparticles synthesis. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1043-1046). [6765823] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765823