Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO 3 Thin Plate on Quartz

Michio Kadota, Yoshimi Ishii Yunoki, Takehito Shimatsu, Miyuki Uomoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

This paper reports the spurious characteristics of Hetero Acoustic Layer (HAL)SAW resonators at high frequency. Spurious-free characteristic is important for carrier aggregation etc. in addition to high impedance ratio, high Q and small temperature coefficient of frequency (TCF). Four types of LT / quartz HAL SAW resonators were fabricated and evaluated up to 14 GHz. All devices show no significant spurious responses. By contrast, a reference HAL SAW resonator with a structure of LT / SiO 2 / Si shows strong spurious responses near the main response. The spurious responses get closer to the main response using a thinner SiO 2 layer, which is inconvenient for TCF compensation. In addition, the TCF of the HAL SAW resonators are discussed in detail.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
CountryJapan
CityKobe
Period18/10/2218/10/25

Keywords

  • LiTaO3
  • SAW resonator
  • TCF
  • hetero acoustic layer
  • impedance ratio
  • quartz
  • spurious response

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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