Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO                         3                          Thin Plate on Quartz

Michio Kadota; Yoshimi Ishii Yunoki; Takehito Shimatsu; Miyuki Uomoto; Shuji Tanaka

doi:10.1109/ULTSYM.2018.8580111

Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz

Michio Kadota, Yoshimi Ishii Yunoki, Takehito Shimatsu, Miyuki Uomoto, Shuji Tanaka

Advanced Interdisciplinary Research Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

28 Citations (Scopus)

Abstract

This paper reports the spurious characteristics of Hetero Acoustic Layer (HAL)SAW resonators at high frequency. Spurious-free characteristic is important for carrier aggregation etc. in addition to high impedance ratio, high Q and small temperature coefficient of frequency (TCF). Four types of LT / quartz HAL SAW resonators were fabricated and evaluated up to 14 GHz. All devices show no significant spurious responses. By contrast, a reference HAL SAW resonator with a structure of LT / SiO ₂ / Si shows strong spurious responses near the main response. The spurious responses get closer to the main response using a thinner SiO ₂ layer, which is inconvenient for TCF compensation. In addition, the TCF of the HAL SAW resonators are discussed in detail.

Original language	English
Title of host publication	2018 IEEE International Ultrasonics Symposium, IUS 2018
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538634257
DOIs	https://doi.org/10.1109/ULTSYM.2018.8580111
Publication status	Published - 2018 Dec 17
Event	2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 2018 Oct 22 → 2018 Oct 25

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2018-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2018 IEEE International Ultrasonics Symposium, IUS 2018
Country/Territory	Japan
City	Kobe
Period	18/10/22 → 18/10/25

Keywords

LiTaO3
SAW resonator
TCF
hetero acoustic layer
impedance ratio
quartz
spurious response

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2018.8580111

Cite this

Kadota, M., Ishii Yunoki, Y., Shimatsu, T., Uomoto, M., & Tanaka, S. (2018). Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz In 2018 IEEE International Ultrasonics Symposium, IUS 2018 [8580111] (IEEE International Ultrasonics Symposium, IUS; Vol. 2018-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8580111

Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz . / Kadota, Michio; Ishii Yunoki, Yoshimi; Shimatsu, Takehito et al.

2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, 2018. 8580111 (IEEE International Ultrasonics Symposium, IUS; Vol. 2018-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kadota, M, Ishii Yunoki, Y, Shimatsu, T, Uomoto, M & Tanaka, S 2018, Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz in 2018 IEEE International Ultrasonics Symposium, IUS 2018., 8580111, IEEE International Ultrasonics Symposium, IUS, vol. 2018-October, IEEE Computer Society, 2018 IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 18/10/22. https://doi.org/10.1109/ULTSYM.2018.8580111

Kadota M, Ishii Yunoki Y, Shimatsu T, Uomoto M, Tanaka S. Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz In 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society. 2018. 8580111. (IEEE International Ultrasonics Symposium, IUS). doi: 10.1109/ULTSYM.2018.8580111

Kadota, Michio ; Ishii Yunoki, Yoshimi ; Shimatsu, Takehito et al. / Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO ₃ Thin Plate on Quartz 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, 2018. (IEEE International Ultrasonics Symposium, IUS).

@inproceedings{af90d2910ecb4d8687c9d254006334af,

title = " Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO 3 Thin Plate on Quartz ",

abstract = " This paper reports the spurious characteristics of Hetero Acoustic Layer (HAL)SAW resonators at high frequency. Spurious-free characteristic is important for carrier aggregation etc. in addition to high impedance ratio, high Q and small temperature coefficient of frequency (TCF). Four types of LT / quartz HAL SAW resonators were fabricated and evaluated up to 14 GHz. All devices show no significant spurious responses. By contrast, a reference HAL SAW resonator with a structure of LT / SiO 2 / Si shows strong spurious responses near the main response. The spurious responses get closer to the main response using a thinner SiO 2 layer, which is inconvenient for TCF compensation. In addition, the TCF of the HAL SAW resonators are discussed in detail. ",

keywords = "LiTaO3, SAW resonator, TCF, hetero acoustic layer, impedance ratio, quartz, spurious response",

author = "Michio Kadota and {Ishii Yunoki}, Yoshimi and Takehito Shimatsu and Miyuki Uomoto and Shuji Tanaka",

year = "2018",

month = dec,

day = "17",

doi = "10.1109/ULTSYM.2018.8580111",

language = "English",

series = "IEEE International Ultrasonics Symposium, IUS",

publisher = "IEEE Computer Society",

booktitle = "2018 IEEE International Ultrasonics Symposium, IUS 2018",

note = "2018 IEEE International Ultrasonics Symposium, IUS 2018 ; Conference date: 22-10-2018 Through 25-10-2018",

}

TY - GEN

T1 - Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO 3 Thin Plate on Quartz

AU - Kadota, Michio

AU - Ishii Yunoki, Yoshimi

AU - Shimatsu, Takehito

AU - Uomoto, Miyuki

AU - Tanaka, Shuji

PY - 2018/12/17

Y1 - 2018/12/17

N2 - This paper reports the spurious characteristics of Hetero Acoustic Layer (HAL)SAW resonators at high frequency. Spurious-free characteristic is important for carrier aggregation etc. in addition to high impedance ratio, high Q and small temperature coefficient of frequency (TCF). Four types of LT / quartz HAL SAW resonators were fabricated and evaluated up to 14 GHz. All devices show no significant spurious responses. By contrast, a reference HAL SAW resonator with a structure of LT / SiO 2 / Si shows strong spurious responses near the main response. The spurious responses get closer to the main response using a thinner SiO 2 layer, which is inconvenient for TCF compensation. In addition, the TCF of the HAL SAW resonators are discussed in detail.

AB - This paper reports the spurious characteristics of Hetero Acoustic Layer (HAL)SAW resonators at high frequency. Spurious-free characteristic is important for carrier aggregation etc. in addition to high impedance ratio, high Q and small temperature coefficient of frequency (TCF). Four types of LT / quartz HAL SAW resonators were fabricated and evaluated up to 14 GHz. All devices show no significant spurious responses. By contrast, a reference HAL SAW resonator with a structure of LT / SiO 2 / Si shows strong spurious responses near the main response. The spurious responses get closer to the main response using a thinner SiO 2 layer, which is inconvenient for TCF compensation. In addition, the TCF of the HAL SAW resonators are discussed in detail.

KW - LiTaO3

KW - SAW resonator

KW - TCF

KW - hetero acoustic layer

KW - impedance ratio

KW - quartz

KW - spurious response

UR - http://www.scopus.com/inward/record.url?scp=85060657668&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85060657668&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2018.8580111

DO - 10.1109/ULTSYM.2018.8580111

M3 - Conference contribution

AN - SCOPUS:85060657668

T3 - IEEE International Ultrasonics Symposium, IUS

BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018

PB - IEEE Computer Society

T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018

Y2 - 22 October 2018 through 25 October 2018

ER -