Suppression of fermi level pinning and flat band voltage shift by inserting diamond-like carbon at a high-k/SiO2 interface in a gate stack structure

Yuta Iwashita, Tetsuya Adachi, Kenji Itaka, Atsushi Ogura, Toyohiro Chikyow

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Suppression of fermi level pinning and flat band voltage shift by inserting diamond-like carbon at a high-k/SiO<sub>2</sub> interface in a gate stack structure'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy