Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

Masato Yasumoto, Shigeharu Tamura, Nagao Kamijo, Yoshio Suzuki, Mitsuhiro Awaji, Akihisa Takeuchi, Hidekazu Takano, Yoshiki Kohmura, Katsumi Handa

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).

Original languageEnglish
Pages (from-to)4747-4748
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number7
DOIs
Publication statusPublished - 2001 Jul
Externally publishedYes

Keywords

  • Columnar structure
  • Cylindrical slit
  • Focused ion beam (FIB)
  • Fresnel zone plate
  • Hard X-ray
  • Magnetron sputtering
  • Scanning ion microscope (SIM)
  • Synchrotron radiation
  • Void

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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