Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

Masato Yasumoto; Shigeharu Tamura; Nagao Kamijo; Yoshio Suzuki; Mitsuhiro Awaji; Akihisa Takeuchi; Hidekazu Takano; Yoshiki Kohmura; Katsumi Handa

doi:10.1143/jjap.40.4747

Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

Masato Yasumoto, Shigeharu Tamura, Nagao Kamijo, Yoshio Suzuki, Mitsuhiro Awaji, Akihisa Takeuchi, Hidekazu Takano, Yoshiki Kohmura, Katsumi Handa

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).

Original language	English
Pages (from-to)	4747-4748
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	7
DOIs	https://doi.org/10.1143/jjap.40.4747
Publication status	Published - 2001 Jul
Externally published	Yes

Keywords

Columnar structure
Cylindrical slit
Focused ion beam (FIB)
Fresnel zone plate
Hard X-ray
Magnetron sputtering
Scanning ion microscope (SIM)
Synchrotron radiation
Void

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/jjap.40.4747

Cite this

Yasumoto, M., Tamura, S., Kamijo, N., Suzuki, Y., Awaji, M., Takeuchi, A., Takano, H., Kohmura, Y., & Handa, K. (2001). Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 40(7), 4747-4748. https://doi.org/10.1143/jjap.40.4747

Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit. / Yasumoto, Masato; Tamura, Shigeharu; Kamijo, Nagao et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 7, 07.2001, p. 4747-4748.

Research output: Contribution to journal › Article › peer-review

Yasumoto, M, Tamura, S, Kamijo, N, Suzuki, Y, Awaji, M, Takeuchi, A, Takano, H, Kohmura, Y & Handa, K 2001, 'Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 40, no. 7, pp. 4747-4748. https://doi.org/10.1143/jjap.40.4747

@article{e660902c3fc04a26a3128cdd4cf00f7a,

title = "Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit",

abstract = "Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).",

keywords = "Columnar structure, Cylindrical slit, Focused ion beam (FIB), Fresnel zone plate, Hard X-ray, Magnetron sputtering, Scanning ion microscope (SIM), Synchrotron radiation, Void",

author = "Masato Yasumoto and Shigeharu Tamura and Nagao Kamijo and Yoshio Suzuki and Mitsuhiro Awaji and Akihisa Takeuchi and Hidekazu Takano and Yoshiki Kohmura and Katsumi Handa",

year = "2001",

month = jul,

doi = "10.1143/jjap.40.4747",

language = "English",

volume = "40",

pages = "4747--4748",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "7",

}

TY - JOUR

T1 - Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

AU - Yasumoto, Masato

AU - Tamura, Shigeharu

AU - Kamijo, Nagao

AU - Suzuki, Yoshio

AU - Awaji, Mitsuhiro

AU - Takeuchi, Akihisa

AU - Takano, Hidekazu

AU - Kohmura, Yoshiki

AU - Handa, Katsumi

PY - 2001/7

Y1 - 2001/7

N2 - Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).

AB - Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).

KW - Columnar structure

KW - Cylindrical slit

KW - Focused ion beam (FIB)

KW - Fresnel zone plate

KW - Hard X-ray

KW - Magnetron sputtering

KW - Scanning ion microscope (SIM)

KW - Synchrotron radiation

KW - Void

UR - http://www.scopus.com/inward/record.url?scp=0035388535&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035388535&partnerID=8YFLogxK

U2 - 10.1143/jjap.40.4747

DO - 10.1143/jjap.40.4747

M3 - Article

AN - SCOPUS:0035388535

SN - 0021-4922

VL - 40

SP - 4747

EP - 4748

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 7

ER -

Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this