Suppression of anomalous threshold voltage increase with area scaling for Mg- or La-incorporated high-k/metal gate nMISFETs in deeply scaled region
T. Morooka, M. Sato, T. Matsuki, T. Suzuki, K. Shiraishi, A. Uedono, S. Miyazaki, K. Ohmori, K. Yamada, T. Nabatame, T. Chikyow, J. Yugami, K. Ikeda, Y. Ohji
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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