Suppression of anomalous threshold voltage increase with area scaling for Mg- or La-incorporated high-k/metal gate nMISFETs in deeply scaled region

T. Morooka, M. Sato, T. Matsuki, T. Suzuki, K. Shiraishi, A. Uedono, S. Miyazaki, K. Ohmori, K. Yamada, T. Nabatame, T. Chikyow, J. Yugami, K. Ikeda, Y. Ohji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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