Superplastic nanoforming of Pd-based amorphous alloy

Yasunori Saotome, Kazuo Itoh, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

184 Citations (Scopus)

Abstract

A precision forming process of microelectromechanical systems (MEMS) parts was described. The forming process was via superplastic microforming of metallic glasses. The Pd-based amorphous alloys were used and were found to be useful for high-performance micro-actuators and microstructures. The macroscopic and microscopic deformation behavior was investigated in the supercooled liquid temperature range.

Original languageEnglish
Pages (from-to)1541-1545
Number of pages5
JournalScripta Materialia
Volume44
Issue number8-9
DOIs
Publication statusPublished - 2001 May 18

Keywords

  • Atomic force microscopy
  • Metal forming
  • Metallic glasses
  • Micro-forming
  • Superplasticity

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys

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