@inproceedings{8c2ec336840547b181dea10731ce321b,
title = "Superplastic nanoforging of Pt-based metallic glass with dies of Zr-BMG and glassy carbon fabricated by focused ion beam",
abstract = "This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures, We used the dies to nano-forge Pt48.75Pd 9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μ-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.",
keywords = "Die, Die forging, FIB, Metallic glass, Nanoforming, Nanoimprint, Superplasticity",
author = "Yasunori Saotome and Suguru Okaniwa and Hisamichi Kimura and Akihisa Inoue",
year = "2007",
month = jan,
day = "1",
doi = "10.4028/0-87849-428-6.2088",
language = "English",
isbn = "0878494286",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
number = "PART 2",
pages = "2088--2093",
booktitle = "Supplement to THERMEC 2006, 5th International Conference on PROCESSING and MANUFACTURING OF ADVANCED MATERIALS, THERMEC 2006",
edition = "PART 2",
note = "5th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2006 ; Conference date: 04-07-2006 Through 08-07-2006",
}