Superplastic nanoforging of Pt-based metallic glass with dies of Zr-BMG and glassy carbon fabricated by focused ion beam

Yasunori Saotome, Suguru Okaniwa, Hisamichi Kimura, Akihisa Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures, We used the dies to nano-forge Pt48.75Pd 9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μ-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.

Original languageEnglish
Title of host publicationSupplement to THERMEC 2006, 5th International Conference on PROCESSING and MANUFACTURING OF ADVANCED MATERIALS, THERMEC 2006
PublisherTrans Tech Publications Ltd
Pages2088-2093
Number of pages6
EditionPART 2
ISBN (Print)0878494286, 9780878494286
DOIs
Publication statusPublished - 2007 Jan 1
Event5th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2006 - Vancouver, Canada
Duration: 2006 Jul 42006 Jul 8

Publication series

NameMaterials Science Forum
NumberPART 2
Volume539-543
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other5th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2006
CountryCanada
CityVancouver
Period06/7/406/7/8

Keywords

  • Die
  • Die forging
  • FIB
  • Metallic glass
  • Nanoforming
  • Nanoimprint
  • Superplasticity

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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