Superplastic micro/nano-formability of La60Al20Ni10Co5Cu5 amorphous alloy in supercooled liquid state

Yasunori Saotome, Toshihisa Hatori, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

84 Citations (Scopus)

Abstract

La60Al20Ni10Co5Cu5 amorphous alloy exhibits an obvious glass transition phenomenon and supercooled liquid state over a wide temperature range. The present paper investigates the macroscopic deformation behavior and microscopic deformation behavior. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, new microforging apparatus and V-grooved microdies of (100) Si were fabricated by a silicon process. The V-groove dies are from 200 nm to 2 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micromaterials for micro-electro-mechanical systems (MEMS).

Original languageEnglish
Pages (from-to)716-720
Number of pages5
JournalMaterials Science and Engineering A
Volume304-306
Issue number1-2
DOIs
Publication statusPublished - 2001 May 31

Keywords

  • Amorphous alloy
  • MEMS
  • Micro-die
  • Micro-formability
  • Newtonian viscous flow
  • Supercooled liquid

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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