Superplastic micro-forming of microstructures

Yasunori Saotome, Akihisa Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

48 Citations (Scopus)


Superplastic micro-forming processes have been applied to forming and fabrication of micromechanical components. Selected materials are a fine grained superplastic Al-78Zn alloy, pure iron as a transformation superplastic material, and amorphous LaAlNi, ZrAlCu alloys which exhibit a supercooled liquid state. With these materials, microformability tests have been carried out with the specially developed evaluation system by using V-grooved micro dies made of (100)silicon. The throat width of the V-groove is from 1 to 20 μm. With these dies, micro-forging has been carried out and the characteristics of micro-formability of the material have been clarified. In a fine grained superplastic alloy of polycrystalline aggregates, the accuracy limit of micro-formability is depend on the grain diameter. On the other hand, quite superior formability has been observed in the amorphous alloys after forming under a supercooled liquid condition. These results indicate an importance of a deformation mechanism from a view point of polycrystalline structure or a micro(μm) scopic scale. A good micro-formability shown above has been applied to a closed die forging of microstructures such as micro pyramids and microdouble gear system. As a result, superplastic materials and amorphous alloys are useful for micro-forming and fabrication of microstructures or components for MEMS.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994 Jan 1
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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