Superplastic micro-forming of microstructures

Yasunori Saotome, Akihisa Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

47 Citations (Scopus)

Abstract

Superplastic micro-forming processes have been applied to forming and fabrication of micromechanical components. Selected materials are a fine grained superplastic Al-78Zn alloy, pure iron as a transformation superplastic material, and amorphous LaAlNi, ZrAlCu alloys which exhibit a supercooled liquid state. With these materials, microformability tests have been carried out with the specially developed evaluation system by using V-grooved micro dies made of (100)silicon. The throat width of the V-groove is from 1 to 20 μm. With these dies, micro-forging has been carried out and the characteristics of micro-formability of the material have been clarified. In a fine grained superplastic alloy of polycrystalline aggregates, the accuracy limit of micro-formability is depend on the grain diameter. On the other hand, quite superior formability has been observed in the amorphous alloys after forming under a supercooled liquid condition. These results indicate an importance of a deformation mechanism from a view point of polycrystalline structure or a micro(μm) scopic scale. A good micro-formability shown above has been applied to a closed die forging of microstructures such as micro pyramids and microdouble gear system. As a result, superplastic materials and amorphous alloys are useful for micro-forming and fabrication of microstructures or components for MEMS.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Pages343-348
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994 Jan 1
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Superplastic micro-forming of microstructures'. Together they form a unique fingerprint.

Cite this