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Superlubricity of CNx-coatings in nitrogen gas atmosphere
Koji Kato,
Koshi Adachi
ENG - Mechanical Systems Engineering
Research output
:
Chapter in Book/Report/Conference proceeding
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Chapter
6
Citations (Scopus)
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Chemistry
Coating Agent
100%
Nitrogen
66%
Gas
50%
Graphite
33%
Structure
33%
Disk
33%
Friction Coefficient
16%
Ion Beam
16%
Electron Beam
16%
Wear Rate
16%
Procedure
16%
Purity
16%
Analytical Method
16%
Hardness
16%
Heating
16%
Physics
Coating
100%
Nitrogen
66%
Gases
50%
Graphite
33%
Targets
33%
Wear
33%
Hardness
16%
Friction
16%
Coefficient of Friction
16%
Sliding
16%
Deposition
16%
Heating
16%
Existence
16%
Running
16%
Engineering
Coating
100%
Si Wafer
50%
Indentation
50%
Humid Air
16%
Hardness
16%
Friction Coefficient
16%
Solid Carbon
16%
Argon Ion
16%
Mechanisms
16%
Heating
16%
Low Friction
16%
Material Science
Coating
100%
Silicon Nitride
50%
Gas
50%
Protective Atmosphere
33%
Hardness
16%
Chemical Engineering
Nitrogen
66%
Carbon
50%
Graphite
33%
Deposition
16%
Heating
16%