Superlubricity mechanism for micro electro mechanical systems

Motohisa Hirano, Hiroki Kuwano, Johan Wilhelm Weijtmans

Research output: Contribution to conferencePaper

9 Citations (Scopus)

Abstract

A new regime of friction - superlubricity - where friction completely vanishes has recently been discovered. This paper discusses superlubricity mechanisms, which can be utilized for Micro Electro Mechanical Systems (MEMS), such as microvalves and micro-assembly systems. From studying friction properties such as the dependence of interfacial lattice misfits and of normal load, it is found that superlubricity is stable under high contact pressure conditions. Experimental evidence of superlubricity is presented by examining systems of sliding atomically clean surfaces by using ultra-high vacuum scanning tunneling microscopy. We have, consequently, proposed the methods for controlling friction and for bonding surfaces by using the superlubricity mechanisms.

Original languageEnglish
Pages436-441
Number of pages6
Publication statusPublished - 1997 Jan 1
Externally publishedYes
EventProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
Duration: 1997 Jan 261997 Jan 30

Other

OtherProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period97/1/2697/1/30

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Hirano, M., Kuwano, H., & Weijtmans, J. W. (1997). Superlubricity mechanism for micro electro mechanical systems. 436-441. Paper presented at Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Nagoya, Jpn, .