Supercritical carbon dioxide regeneration of activated carbon for exhaust processing

Yasuyuki Ito, Ikuo Ushiki, Yoshiyuki Sato, Hiroshi Inomata

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Supercritical carbon dioxide (ScCO 2 ) is a promising solvent for regeneration because of its high diffusivity into the microstructure of activated carbon and its ability to operate at a moderate temperature. In this study, we investigated a ScCO 2 cleaning method of the activated carbon used in the exhaust processor of a semiconductor manufacturing process. The ScCO 2 cleaning was carried out at temperature of 80°C, pressure of 20 MPa and regeneration time of 6.0 h. The experimental results showed the activated carbon used in the exhaust processor for a long duration could not be regenerated. Thermogravimetric analysis (TGA) showed that ScCO 2 could remove low boiling point adsorbates (100‒400°C) but not high boiling point adsorbates (400‒900°C). Analysis of the results of ScCO 2 cleaning in terms of a high boiling point ratio, defined as the proportion of high boiling point adsorbates, showed that regeneration rates of 90% and 80% respectively were achieved at high boiling ratios of 2.0% and 4.0%, suggesting that the high boiling point ratio could serve as an indicator of potential regeneration rate.

Original languageEnglish
Pages (from-to)29-34
Number of pages6
Journalkagaku kogaku ronbunshu
Volume45
Issue number1
DOIs
Publication statusPublished - 2019 Jan 20

Keywords

  • Activated Carbon
  • Exhaust Processing
  • Regeneration
  • Supercritical Carbon Dioxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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