Super-precise evaluation of EUVL-grade ultra-low-expansion glasses using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)673-678
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume74
Issue number7
DOIs
Publication statusPublished - 2008 Jul

Keywords

  • Coefficient-of-thermal-expansion evaluation
  • Extreme ultraviolet lithography
  • Leaky surface acoustic wave
  • Line-focus beam ultrasonic material characterization system
  • Precise measurement
  • Silica-titanium glass
  • Ultra-low-expansion glass
  • Velocity measurement

ASJC Scopus subject areas

  • Mechanical Engineering

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