Super-high-frequency band filters configured with air-gap-type thin-film bulk acoustic resonators

Motoaki Hara, Tsuyoshi Yokoyama, Takeshi Sakashita, Shinji Taniguchi, Masafumi Iwaki, Tokihiro Nishihara, Masanori Ueda, Yoshio Satoh

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    21 Citations (Scopus)

    Abstract

    The first 24 and 30 GHz band thin-film bulk acoustic resonator (FBAR) filters are reported in this paper. The filters were configured with air-gaptype FBARs on a flat silicon substrate. They were designed using a Butterworth-Van-Dyke (BVD) equivalent circuit considering the linear relationship between resonant frequency, capacitance ratio, and loss in the FBAR. The measured characteristics corresponded with those of the simulation using the equivalent circuit in the pass-band. The center frequency, fractional bandwidth, minimum insertion loss, and out-of-band suppression were 23.8 GHz, 3.4%, -3:8 dB, and -13 dB in the 24 GHz band filter, and 29.2 GHz, 3.4%, -3:8 dB, and -11 dB in the 30 GHz band filter, respectively.

    Original languageEnglish
    Article number07HD13
    JournalJapanese journal of applied physics
    Volume49
    Issue number7 PART 2
    DOIs
    Publication statusPublished - 2010 Jul 1

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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  • Cite this

    Hara, M., Yokoyama, T., Sakashita, T., Taniguchi, S., Iwaki, M., Nishihara, T., Ueda, M., & Satoh, Y. (2010). Super-high-frequency band filters configured with air-gap-type thin-film bulk acoustic resonators. Japanese journal of applied physics, 49(7 PART 2), [07HD13]. https://doi.org/10.1143/JJAP.49.07HD13