TY - JOUR
T1 - Super-high-frequency band filters configured with air-gap-type thin-film bulk acoustic resonators
AU - Hara, Motoaki
AU - Yokoyama, Tsuyoshi
AU - Sakashita, Takeshi
AU - Taniguchi, Shinji
AU - Iwaki, Masafumi
AU - Nishihara, Tokihiro
AU - Ueda, Masanori
AU - Satoh, Yoshio
PY - 2010/7/1
Y1 - 2010/7/1
N2 - The first 24 and 30 GHz band thin-film bulk acoustic resonator (FBAR) filters are reported in this paper. The filters were configured with air-gaptype FBARs on a flat silicon substrate. They were designed using a Butterworth-Van-Dyke (BVD) equivalent circuit considering the linear relationship between resonant frequency, capacitance ratio, and loss in the FBAR. The measured characteristics corresponded with those of the simulation using the equivalent circuit in the pass-band. The center frequency, fractional bandwidth, minimum insertion loss, and out-of-band suppression were 23.8 GHz, 3.4%, -3:8 dB, and -13 dB in the 24 GHz band filter, and 29.2 GHz, 3.4%, -3:8 dB, and -11 dB in the 30 GHz band filter, respectively.
AB - The first 24 and 30 GHz band thin-film bulk acoustic resonator (FBAR) filters are reported in this paper. The filters were configured with air-gaptype FBARs on a flat silicon substrate. They were designed using a Butterworth-Van-Dyke (BVD) equivalent circuit considering the linear relationship between resonant frequency, capacitance ratio, and loss in the FBAR. The measured characteristics corresponded with those of the simulation using the equivalent circuit in the pass-band. The center frequency, fractional bandwidth, minimum insertion loss, and out-of-band suppression were 23.8 GHz, 3.4%, -3:8 dB, and -13 dB in the 24 GHz band filter, and 29.2 GHz, 3.4%, -3:8 dB, and -11 dB in the 30 GHz band filter, respectively.
UR - http://www.scopus.com/inward/record.url?scp=77956574062&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77956574062&partnerID=8YFLogxK
U2 - 10.1143/JJAP.49.07HD13
DO - 10.1143/JJAP.49.07HD13
M3 - Article
AN - SCOPUS:77956574062
VL - 49
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART 2
M1 - 07HD13
ER -