Super-accurate velocity measurement for evaluating TiO2-SiO 2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Yuji Ohashi, Mototaka Arakawa, Jun Ichi Kushibiki

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A method of improving the measurement accuracy of leaky surface acoustic wave (LSAW) velocity for TiO2-doped SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization (LFB-UMC) system was investigated theoretically and experimentally. The frequency dependence of the interference waveform attenuation in a V(z) curve obtained for the glass was calculated by considering the propagation attenuation of LSAWs. The theoretical results revealed that the waveform attenuation depends primarily on acoustic energy loss due to the water-loading effect on the specimen surface, and that the waveform attenuation decreases with decreasing frequency. Significant improvement of the measurement accuracy was successfully demonstrated by using an LFB ultrasonic device with a larger curvature radius R of the cylindrical sapphire acoustic lens. R = 2.0 mm, yielding an improved value of ±0.0020% obtained at 75 MHz, as compared to ±0.0053% obtained at 225 MHz with a cylindrical lens of R = 1.0 mm.

Original languageEnglish
Pages (from-to)L1313-L1315
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume44
Issue number42-45
DOIs
Publication statusPublished - 2005 Dec 1

Keywords

  • CTE evaluation
  • EUVL system
  • Leaky surface acoustic wave
  • Line-focus-beam ultrasonic material characterization system
  • TiO -doped SiO glass
  • Ultra-low-expansion glass
  • Velocity measurement

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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