Subwavelength gratings combined with MEMS

K. Hane, J. S. Ye, Y. Kanamori

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Subwavelength gratings attract a high level of interest in wavelength selection for optical filter. High reflection and efficient wavelength selection are attained using the resonant effects of the gratings. Some subwavelength effects of gratings such as antireflection and structural color are studied. Combining with the MEMS actuator, the pitch of the gratings can be varied, and thus the color of the grating is modulated. Moreover, we also fabricated subwavelength reflection-variable gratings from silicon wafer and the optical characteristics have been investigated.

Original languageEnglish
Title of host publicationSociety for Information Display - 14th International Display Workshops, IDW '07
Number of pages3
Publication statusPublished - 2007 Dec 1
Event14th International Display Workshops, IDW '07 - Sapporo, Japan
Duration: 2007 Dec 52007 Dec 5

Publication series

NameIDW '07 - Proceedings of the 14th International Display Workshops


Other14th International Display Workshops, IDW '07

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Atomic and Molecular Physics, and Optics


Dive into the research topics of 'Subwavelength gratings combined with MEMS'. Together they form a unique fingerprint.

Cite this