The formation of subsurface oxygen on a clean and sputtered Ru(0001) surface is studied using thermal desorption spectroscopy (TDS) and low energy electron diffraction (LEED). The oxygen was incorporated by exposing the surface to a partial oxygen pressure in the range of 10-8 -10-9 Torr. By monitoring the signal of recombinatively desorbed molecular oxygen as a function of sample temperature, we found that oxygen molecules penetrated into the subsurface region after saturating the adsorbed layer characterized by the p(2 × 2) LEED pattern indicative of 0.25 monolayers (1 ML = 1.58 × 1015 cm-2). In contrast, the defects generated by Ar+ sputtering on the Ru surface appear at thermally more stable sites in high-temperature O2 thermal desorption states.
|Number of pages||5|
|Journal||Journal of the Korean Physical Society|
|Publication status||Published - 2003 Mar 1|
- Thermal desorption spectroscopy
ASJC Scopus subject areas
- Physics and Astronomy(all)