Production of three-dimensional tomographic images with sub-μm resolution, using a hard x-ray imaging microscope with a Fresnel zone plate objective was reported. The x-ray energy was set to 8 keV by passing the x-rays through a liquid-nitrogen-cooled Si 111 double-crystal monochromator. Images of the sample at different rotation angles were acquired with 1 or 0.5 degree steps in each computerized tomography scan. Three-dimensional images of various samples were observed and successfully reconstructed with a pitch pattern of 0.6μm.
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