Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography

Akihisa Takeuchi, Kentaro Uesugi, Hidekazu Takano, Yoshio Suzuki

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

Production of three-dimensional tomographic images with sub-μm resolution, using a hard x-ray imaging microscope with a Fresnel zone plate objective was reported. The x-ray energy was set to 8 keV by passing the x-rays through a liquid-nitrogen-cooled Si 111 double-crystal monochromator. Images of the sample at different rotation angles were acquired with 1 or 0.5 degree steps in each computerized tomography scan. Three-dimensional images of various samples were observed and successfully reconstructed with a pitch pattern of 0.6μm.

Original languageEnglish
Pages (from-to)4246-4249
Number of pages4
JournalReview of Scientific Instruments
Volume73
Issue number12
DOIs
Publication statusPublished - 2002 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Dive into the research topics of 'Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography'. Together they form a unique fingerprint.

  • Cite this