Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography

Akihisa Takeuchi; Kentaro Uesugi; Hidekazu Takano; Yoshio Suzuki

doi:10.1063/1.1515385

Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography

Akihisa Takeuchi, Kentaro Uesugi, Hidekazu Takano, Yoshio Suzuki

Research output: Contribution to journal › Article › peer-review

46 Citations (Scopus)

Abstract

Production of three-dimensional tomographic images with sub-μm resolution, using a hard x-ray imaging microscope with a Fresnel zone plate objective was reported. The x-ray energy was set to 8 keV by passing the x-rays through a liquid-nitrogen-cooled Si 111 double-crystal monochromator. Images of the sample at different rotation angles were acquired with 1 or 0.5 degree steps in each computerized tomography scan. Three-dimensional images of various samples were observed and successfully reconstructed with a pitch pattern of 0.6μm.

Original language	English
Pages (from-to)	4246-4249
Number of pages	4
Journal	Review of Scientific Instruments
Volume	73
Issue number	12
DOIs	https://doi.org/10.1063/1.1515385
Publication status	Published - 2002 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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author = "Akihisa Takeuchi and Kentaro Uesugi and Hidekazu Takano and Yoshio Suzuki",

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AU - Takano, Hidekazu

AU - Suzuki, Yoshio

PY - 2002/12/1

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AB - Production of three-dimensional tomographic images with sub-μm resolution, using a hard x-ray imaging microscope with a Fresnel zone plate objective was reported. The x-ray energy was set to 8 keV by passing the x-rays through a liquid-nitrogen-cooled Si 111 double-crystal monochromator. Images of the sample at different rotation angles were acquired with 1 or 0.5 degree steps in each computerized tomography scan. Three-dimensional images of various samples were observed and successfully reconstructed with a pitch pattern of 0.6μm.

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Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography

Abstract

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