Abstract
Production of three-dimensional tomographic images with sub-μm resolution, using a hard x-ray imaging microscope with a Fresnel zone plate objective was reported. The x-ray energy was set to 8 keV by passing the x-rays through a liquid-nitrogen-cooled Si 111 double-crystal monochromator. Images of the sample at different rotation angles were acquired with 1 or 0.5 degree steps in each computerized tomography scan. Three-dimensional images of various samples were observed and successfully reconstructed with a pitch pattern of 0.6μm.
| Original language | English |
|---|---|
| Pages (from-to) | 4246-4249 |
| Number of pages | 4 |
| Journal | Review of Scientific Instruments |
| Volume | 73 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2002 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Instrumentation
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Cite this
Takeuchi, A., Uesugi, K., Takano, H., & Suzuki, Y. (2002). Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography. Review of Scientific Instruments, 73(12), 4246-4249. https://doi.org/10.1063/1.1515385