Sub-wavelength pattern transfer by near field photo-lithography

Ono Takahito; Ohtomo Mika; Masayoshi Esashi

doi:10.1109/IMNC.1998.730083

Sub-wavelength pattern transfer by near field photo-lithography

Ono Takahito, Ohtomo Mika, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 1998
Subtitle of host publication	1998 International Microprocesses and Nanotechnology Conference
Editors	Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	283-284
Number of pages	2
ISBN (Electronic)	4930813832, 9784930813831
DOIs	https://doi.org/10.1109/IMNC.1998.730083
Publication status	Published - 1998 Jan 1
Event	1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of Duration: 1998 Jul 13 → 1998 Jul 16

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
Volume	1998-July

Other

Other	1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Country	Korea, Republic of
City	Kyoungju
Period	98/7/13 → 98/7/16

ASJC Scopus subject areas

Materials Science(all)
Nuclear and High Energy Physics
Computer Science Applications

Access to Document

10.1109/IMNC.1998.730083

Cite this

Takahito, O., Mika, O., & Esashi, M. (1998). Sub-wavelength pattern transfer by near field photo-lithography. In H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (Eds.), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 283-284). [730083] (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.730083

Sub-wavelength pattern transfer by near field photo-lithography. / Takahito, Ono; Mika, Ohtomo; Esashi, Masayoshi.

Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. ed. / Hyung Joon Yoo; Shinji Okazaki; Jinho Ahn; Ohyun Kim; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. p. 283-284 730083 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takahito, O, Mika, O & Esashi, M 1998, Sub-wavelength pattern transfer by near field photo-lithography. in HJ Yoo, S Okazaki, J Ahn, O Kim & M Komuro (eds), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference., 730083, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference, vol. 1998-July, Institute of Electrical and Electronics Engineers Inc., pp. 283-284, 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, Kyoungju, Korea, Republic of, 98/7/13. https://doi.org/10.1109/IMNC.1998.730083

Takahito O, Mika O, Esashi M. Sub-wavelength pattern transfer by near field photo-lithography. In Yoo HJ, Okazaki S, Ahn J, Kim O, Komuro M, editors, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1998. p. 283-284. 730083. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference). https://doi.org/10.1109/IMNC.1998.730083

Takahito, Ono ; Mika, Ohtomo ; Esashi, Masayoshi. / Sub-wavelength pattern transfer by near field photo-lithography. Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. editor / Hyung Joon Yoo ; Shinji Okazaki ; Jinho Ahn ; Ohyun Kim ; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 283-284 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference).

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