@inproceedings{a87856a3560c47c4a6dd4ed3f35d87cd,
title = "Sub-wavelength pattern transfer by near field photo-lithography",
author = "Ono Takahito and Ohtomo Mika and Masayoshi Esashi",
year = "1998",
month = jan,
day = "1",
doi = "10.1109/IMNC.1998.730083",
language = "English",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "283--284",
editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
note = "1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
}