Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.

Original languageEnglish
Title of host publicationMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages69-71
Number of pages3
ISBN (Electronic)9780979806483
Publication statusPublished - 2015 Jan 1
Event19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015 - Gyeongju, Korea, Republic of
Duration: 2015 Oct 252015 Oct 29

Publication series

NameMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Other

Other19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
CountryKorea, Republic of
CityGyeongju
Period15/10/2515/10/29

Keywords

  • Microfluidic chip
  • Resonant thermal sensor
  • Single cell

ASJC Scopus subject areas

  • Control and Systems Engineering

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