TY - GEN
T1 - Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells
AU - Inomata, Naoki
AU - Toda, Masaya
AU - Ono, Takahito
PY - 2015/1/1
Y1 - 2015/1/1
N2 - We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.
AB - We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.
KW - Microfluidic chip
KW - Resonant thermal sensor
KW - Single cell
UR - http://www.scopus.com/inward/record.url?scp=84983356235&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84983356235&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84983356235
T3 - MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
SP - 69
EP - 71
BT - MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PB - Chemical and Biological Microsystems Society
T2 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
Y2 - 25 October 2015 through 29 October 2015
ER -