Sub-100 nm hard x-ray microbeam generation with Fresnel zone plate optics

Hidekazu Takano, Yoshio Suzuki, Akihisa Takeuchi

Research output: Contribution to journalLetterpeer-review

39 Citations (Scopus)


A hard X-ray focusing test of a Fresnel zone plate has been performed with a synchrotron radiation source at the undulator beamline 20XU of SPring-8. A Fresnel zone plate with a radius of 150 μm, and an outermost zone width of 100 nm was used for the X-ray focusing device. The 248-m-long beamline provides fully coherent illumination for the focusing device. The focused beam was evaluated by the knife-edge-scan method and scanning microscope test using test charts. Nearly diffraction-limited focusing with a size of 120 nm was achieved for the first-order diffraction at 10 keV X-ray. Evaluation for the third-order diffraction was also performed at 8 keV X-ray, and a focal size of 50 nm has been obtained.

Original languageEnglish
Pages (from-to)L132-L134
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number2 A
Publication statusPublished - 2003 Feb 1
Externally publishedYes


  • Fresnel zone plate
  • Microbeam
  • Synchrotron radiation
  • X-ray microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)


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