Study on the measurement of microscopic RF field distribution with a MFM tip exploiting a beat signal between a CPW and an exciting coil

Y. Endo, M. Onishi, M. Fukushima, K. Arai, K. Yanagi, Y. Shimada, M. Yamaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes a measurement of microscopic radio frequency (RF) field distribution with a magnetic force microscope (MFM) tip exploring a beat signal from a coplanar waveguide (CPW). This CPW has a 5 μm wide signal line and a 50 μm wide ground line assuming a basic model of power/ground lines in radio frequency integrated circuit (RFIC) chips. To produce a beating field near the CPW, a signal current with a fixed frequency in the GHz range is supplied to the CPW and a reference current with a slightly different frequency from a signal frequency is supplied to a semicircular exciting coil. The reference is adjusted to produce the beat with frequency in the vicinity of the cantilever resonance frequency. The mechanical resonance of the cantilever responding to the beat field above the CPW surface was successfully detected with signal frequency in the GHz range. This result provides a basic principle that, by exploring a reference RF field, RF magnetic fields radiated from signal lines, ground lines and power sources in RFIC chips are detectable with very high spatial resolution.

Original languageEnglish
Title of host publicationEMC 2014/Tokyo - 2014 International Symposium on Electromagnetic CompatibiIity, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages517-520
Number of pages4
ISBN (Electronic)9784885522871
Publication statusPublished - 2014 Dec 23
Event2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014 - Tokyo, Japan
Duration: 2014 May 122014 May 16

Publication series

NameIEEE International Symposium on Electromagnetic Compatibility
Volume2014-December
ISSN (Print)1077-4076
ISSN (Electronic)2158-1118

Other

Other2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014
Country/TerritoryJapan
CityTokyo
Period14/5/1214/5/16

Keywords

  • Magnetic force microscope (MFM)
  • beating field
  • coplanar waveguide (CPW)
  • exciting coil
  • radio frequency integrated circuit (RFIC)

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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