Study on replication of micro channel structures onto polytetrafluoroethylene (PTFE) substrate employing two-stage hot embossing

Shin Ichiro Hira, Zhuqing Wang, Masato Yoshioka, Yu Zhang, Yutaka Nobukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Replication of micro structures on a polymer substrate employing two-stage hot embossing is described in this paper. Linear channels with rectangular cross section were fabricated on a master mold of a brass plate by means of a computer numerical control (CNC) machining center using a micro end mill. In the first embossing process, the master mold with concavity features was embossed on a polycarbonate (PC) plate in order to make a "polymer replication mold". Polytetrafluoroethylene (PTFE) was chosen as a material of polymer substrate used in the second embossing process. The replicated structure on PTFE substrate was observed and each dimension of its cross-sectional shape was also measured in order to assess the replication accuracy. According to the results, it was found that the depth of a replicated channel was near 90 % of that on the master mold. But roundness at each corner could be also found due to the insufficiency of plastic flow. Furthermore the deformation of the structures on a replication mold of PC before and after 2nd hot embossing process was alsoexamined. As a result, it was found that the deformation ratio at temperatures below 145 °C was roughly smaller than 10 %.

Original languageEnglish
Title of host publicationAdvances in Abrasive Technology XII
Pages526-531
Number of pages6
DOIs
Publication statusPublished - 2009 Dec 1
Externally publishedYes
Event12th International Symposium on Advances in Abrasive Technology, ISAAT2009 - Gold Coast, QLD, Australia
Duration: 2009 Sep 272009 Sep 30

Publication series

NameAdvanced Materials Research
Volume76-78
ISSN (Print)1022-6680

Other

Other12th International Symposium on Advances in Abrasive Technology, ISAAT2009
CountryAustralia
CityGold Coast, QLD
Period09/9/2709/9/30

Keywords

  • Assessment of replication accuracy
  • Polytetrafluoroethylene (PTFE)
  • Replication of micro channel structures
  • Two-stage hot embossing

ASJC Scopus subject areas

  • Engineering(all)

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