@inproceedings{aaea7ae353ec4e1390fc8c7d64840183,
title = "Study on Amorphous InGaZnO thin film transistors optimized by oxygen neutral beam treatment",
abstract = "Amorphous InGaZnO (a-IGZO) is used as TFTs channel layer, it is deposited with atmospheric-pressure PECVD (AP-PECVD). By AP-PECVD, a-IGZO can be deposited without vacuum system, and keep the cost down and applied to large area manufacturing. To further improve the electrical characteristics of atmospheric-pressure deposited a-IGZO (AP-IGZO) TFTs, post processing by re-oxidation (NBRO) is applied to treat on top of AP-IGZO thin film. The investigation shows when the NBRO post-deposited annealing (PDA) power is 400W for 300 seconds, better electrical characteristic is achieved as mobility of 10.78 cm2/Vs, small subthreshold swing of 100 mV/dec, lower off-state leakage current 3.7×10-12 A, and better Ion/Ioff ratio of 2.76×106.",
keywords = "AP-PECVD, Neutral beam re-oxidation (NBRO), a-IGZO TFTs",
author = "Wu, {C. H.} and Chang, {K. M.} and Chen, {Y. M.} and Huang, {B. W.} and Zhang, {Y. X.} and S. Samukawa and S. Noda and Li, {Y. M.} and Wang, {S. J.} and Shih, {B. J.} and Chang, {K. M.} and Wu, {C. H.}",
note = "Funding Information: ACKNOWLEDGMENT The authors would like to thank National Device Lab (NDL), Nano Facility Center (NFC), Industrial Technology Research Institute (ITRI) for experiment techniques support, and Ministry of Science and Technology (MOST) for financial funding, under Contact No. MOST 106-2221-E-009-150. Publisher Copyright: {\textcopyright} 2017 IEEE.; 2nd International Conference on Communication and Electronics Systems, ICCES 2017 ; Conference date: 19-10-2017 Through 20-10-2017",
year = "2018",
month = mar,
day = "21",
doi = "10.1109/CESYS.2017.8321130",
language = "English",
series = "Proceedings of the 2nd International Conference on Communication and Electronics Systems, ICCES 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "517--520",
booktitle = "Proceedings of the 2nd International Conference on Communication and Electronics Systems, ICCES 2017",
}