Study of Vacuum-Assisted Spin Coating of Polymer Liner for High-Aspect-Ratio Through-Silicon-Via Applications

Yangyang Yan, Yingtao Ding, Takafumi Fukushima, Kang Wook Lee, Mitsumasa Koyanagi

Research output: Contribution to journalArticle

8 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science