Study of ultra shallow junction and tilted channel implantation for high performance 0.1 μm pMOSFETs

Ken ichi Goto, Masataka Kase, Yoichi Momiyama, Hajime Kurata, Tetsu Tanaka, Manabu Deura, Yasuhiro Sanbonsugi, Toshihiro Sugii

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17 Citations (Scopus)

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