Study of electronic structures for Fe thin films deposited on Si- and C-faces of 4H-SiC substrates by soft X-ray emission spectroscopy

M. Hirai, T. Wakita, H. Okazaki, D. Koishihara, Y. Muraoka, T. Yokoya

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Silicon carbide (SiC) is a candidate material for electronic devices to operate upon crucial environment. Electronic states of silicides and/or carbide/graphite formed in metal/SiC contact system are fundamentally important from the viewpoint of device performance. We study interface electronic structure of iron thin film deposited on silicon (Si)- and carbon (C)-face of 4H-SiC(0 0 0 1) by using a soft X-ray emission spectroscopy (SXES). For specimens of Fe (50 nm)/4H-SiC (substrate) contact systems annealed at 700 and 900 °C, the Si L 2,3 emission spectra indicate different shapes and peak energies from the substrate depending on thermal-treated temperature. The product of materials such as silicides is suggested. Further, from comparison of Si L 2,3 emission spectra between Si- and C-face for the same annealing temperature at 700 °C, it is concluded that the similar silicides and/or ternary materials are formed on the two surfaces. However for those of 900 °C, the film on substrate is composed of the different silicide and/or ternary materials.

    Original languageEnglish
    Pages (from-to)26-28
    Number of pages3
    JournalApplied Surface Science
    Volume254
    Issue number1 SPEC. ISS.
    DOIs
    Publication statusPublished - 2007 Oct 31

    Keywords

    • 4H-SiC
    • C-face
    • Fe
    • SXES
    • Si-face
    • Silicide

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

    Fingerprint

    Dive into the research topics of 'Study of electronic structures for Fe thin films deposited on Si- and C-faces of 4H-SiC substrates by soft X-ray emission spectroscopy'. Together they form a unique fingerprint.

    Cite this