TY - JOUR
T1 - Study and fabrication of a flexible Zr-based metallic glass thin film strain gauge
AU - Lu, Yen Chi
AU - Chiang, Chun Yu
AU - Chen, Yu Chieh
AU - Rin, Ikusei
AU - Ono, Takahito
AU - Tsai, Yao Chuan
N1 - Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/6/1
Y1 - 2020/6/1
N2 - Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.
AB - Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.
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U2 - 10.35848/1347-4065/ab7f1b
DO - 10.35848/1347-4065/ab7f1b
M3 - Article
AN - SCOPUS:85083299129
VL - 59
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SI
M1 - SIIG10
ER -