Study and fabrication of a flexible Zr-based metallic glass thin film strain gauge

Yen Chi Lu; Chun Yu Chiang; Yu Chieh Chen; Ikusei Rin; Takahito Ono; Yao Chuan Tsai

doi:10.35848/1347-4065/ab7f1b

Study and fabrication of a flexible Zr-based metallic glass thin film strain gauge

Yen Chi Lu, Chun Yu Chiang, Yu Chieh Chen, Ikusei Rin, Takahito Ono, Yao Chuan Tsai

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10^-6 °C^-1, which is essential to reduce thermal drift for strain gauge applications.

Original language	English
Article number	SIIG10
Journal	Japanese journal of applied physics
Volume	59
Issue number	SI
DOIs	https://doi.org/10.35848/1347-4065/ab7f1b
Publication status	Published - 2020 Jun 1

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.",

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AU - Ono, Takahito

AU - Tsai, Yao Chuan

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AB - Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.

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