Studies on ultrathin silicon oxide films and their current problems

T. Hattori

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)695-700
    Number of pages6
    JournalShinku/Journal of the Vacuum Society of Japan
    Volume44
    Issue number8
    DOIs
    Publication statusPublished - 2001

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

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