Structure, mechanical properties and imprint-ability of Pd-Cu-Ni-P glassy alloy thin film prepared by a pulsed-laser deposition method

Kana Takenaka, Nozomu Togashi, Nobuyuki Nishiyama, Akihisa Inoue

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

With the aim of preparing nano-hole array for bit patterned media of ultra high density data storage, fabrication and imprint-ability of Pd-Cu-Ni-P glassy alloy thin film was investigated. By using a pulsed-laser deposition method, the Pd-based glassy alloy thin film was successfully fabricated. The thermal characteristics of the obtained film were very close to those of the melt-spun glassy alloy ribbon. The obtained film has very smooth surface and high hardness, which are suitable for nano-imprint processing. Nano-imprint-ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The periodic dot pattern of the mold was precisely transcribed. These results suggest that the Pd-Cu-Ni-P glassy alloy thin films are potential nano-imprinting materials for fabricating bit patterned media.

Original languageEnglish
Pages (from-to)1542-1545
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume356
Issue number31-32
DOIs
Publication statusPublished - 2010 Jul 8

Keywords

  • Glassy alloy
  • Mechanical properties
  • Nano-imprint lithography
  • Thermal stability
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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