Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition

T. Kato, G. H. Jeong, T. Hirata, R. Hatakeyama

Research output: Contribution to journalConference article

31 Citations (Scopus)

Abstract

Carbon nanotube structures such as tube diameter, growth site, and formation density are controlled using radio-frequency (RF, 13.56 MHz) plasma enhanced chemical vapor deposition (RF-PECVD) method. We have produced uniformly well-aligned multi-walled carbon nanotubes (MWNTs) grown over the large scale area and linearly arrayed MWNTs grown in a selected area without any highly-sophisticated patterning process. In our RF-PECVD experiment, furthermore, individually grown single-walled carbon nanotubes (SWNTs) or their thin bundles are synthesized for the first time within the scope of the PECVD methods. These results indicate that PECVD method provides the high potential for the further development of nano-technology.

Original languageEnglish
Pages (from-to)2-6
Number of pages5
JournalThin Solid Films
Volume457
Issue number1
DOIs
Publication statusPublished - 2004 Jun 1
Event16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan
Duration: 2003 Jun 42003 Jun 5

Keywords

  • Carbon nanotube
  • Plasma enhanced chemical vapor deposition
  • Sputtering
  • Zeolites

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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