Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering

Hideki Nakazawa, Takamasa Mikami, Yoshiharu Enta, Maki Suemitsu, Masao Mashita

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Abstract

We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and 2 bonds indicates that the DLC films have high thermal stabilities.

Original languageEnglish
Pages (from-to)L676-L679
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number6 B
Publication statusPublished - 2003 Jun 15

Keywords

  • Amorphous carbon
  • Chemical bonding
  • Diamond-like carbon
  • Photoelectron spectroscopy
  • RF magnetron sputtering
  • Raman spectroscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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