Abstract
We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and 2 bonds indicates that the DLC films have high thermal stabilities.
Original language | English |
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Pages (from-to) | L676-L679 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 42 |
Issue number | 6 B |
Publication status | Published - 2003 Jun 15 |
Keywords
- Amorphous carbon
- Chemical bonding
- Diamond-like carbon
- Photoelectron spectroscopy
- RF magnetron sputtering
- Raman spectroscopy
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)