Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering

Hideki Nakazawa; Takamasa Mikami; Yoshiharu Enta; Maki Suemitsu; Masao Mashita

Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering

Hideki Nakazawa, Takamasa Mikami, Yoshiharu Enta, Maki Suemitsu, Masao Mashita

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Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp² and 38% sp³ bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp³/sp² ratio in a film does not change even at 900°C. The absence of conversion between sp³ and ² bonds indicates that the DLC films have high thermal stabilities.

Original language	English
Pages (from-to)	L676-L679
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	42
Issue number	6 B
Publication status	Published - 2003 Jun 15

Keywords

Amorphous carbon
Chemical bonding
Diamond-like carbon
Photoelectron spectroscopy
RF magnetron sputtering
Raman spectroscopy

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering. / Nakazawa, Hideki; Mikami, Takamasa; Enta, Yoshiharu; Suemitsu, Maki; Mashita, Masao.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 42, No. 6 B, 15.06.2003, p. L676-L679.

Research output: Contribution to journal › Article › peer-review

@article{3b18f13f45ca4c6aa124c392cc06b871,

title = "Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering",

abstract = "We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and 2 bonds indicates that the DLC films have high thermal stabilities.",

keywords = "Amorphous carbon, Chemical bonding, Diamond-like carbon, Photoelectron spectroscopy, RF magnetron sputtering, Raman spectroscopy",

author = "Hideki Nakazawa and Takamasa Mikami and Yoshiharu Enta and Maki Suemitsu and Masao Mashita",

year = "2003",

month = jun,

day = "15",

language = "English",

volume = "42",

pages = "L676--L679",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "6 B",

}

TY - JOUR

T1 - Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering

AU - Nakazawa, Hideki

AU - Mikami, Takamasa

AU - Enta, Yoshiharu

AU - Suemitsu, Maki

AU - Mashita, Masao

PY - 2003/6/15

Y1 - 2003/6/15

N2 - We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and 2 bonds indicates that the DLC films have high thermal stabilities.

AB - We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and 2 bonds indicates that the DLC films have high thermal stabilities.

KW - Amorphous carbon

KW - Chemical bonding

KW - Diamond-like carbon

KW - Photoelectron spectroscopy

KW - RF magnetron sputtering

KW - Raman spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=0042866089&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042866089&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0042866089

VL - 42

SP - L676-L679

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6 B

ER -

Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering

Abstract

Keywords

ASJC Scopus subject areas

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