STRUCTURE AND WEAR RESISTANCE OF A TiC FILM OBLIQUELY DEPOSITED BY THE ACTIVATED REACTIVE EVAPORATION TECHNIQUE.

Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

Abstract

TiC films were obliquely deposited onto sintered steel substrates by means of the activated reactive evaporation method. When the angle between the direction of deposition and the normal to the substrate was greater than 22 degree , the hardness of the film decreased and the wear rate increased. In this case, the grain size, determined from X-ray diffraction line widths, decreased; this observation is inconsistent with Petch's findings for the relationship between the grain size and the strength of polycrystalline materials. At the same time, the texture of the film observed by SEM was seen to become fibrous, and the composition of the film measured by XMA exhibited some variations. These results suggest that the cause of the decrease in the hardness and the increase in the wear rate was the presence of discontinuities, such as pores or impurities, in the grain boundaries of the deposited film. In addition, a conspicuous (111) crystal orientation was observed when the deposition angle was in the region of 48 degree .

Original languageEnglish
Pages (from-to)119-124
Number of pages6
JournalJournal of Japan Society of Lubrication Engineers
Volume27
Issue number2
Publication statusPublished - 1982 Jan 1

ASJC Scopus subject areas

  • Engineering(all)

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