TiC films were obliquely deposited onto sintered steel substrates by means of the activated reactive evaporation method. When the angle between the direction of deposition and the normal to the substrate was greater than 22 degree , the hardness of the film decreased and the wear rate increased. In this case, the grain size, determined from X-ray diffraction line widths, decreased; this observation is inconsistent with Petch's findings for the relationship between the grain size and the strength of polycrystalline materials. At the same time, the texture of the film observed by SEM was seen to become fibrous, and the composition of the film measured by XMA exhibited some variations. These results suggest that the cause of the decrease in the hardness and the increase in the wear rate was the presence of discontinuities, such as pores or impurities, in the grain boundaries of the deposited film. In addition, a conspicuous (111) crystal orientation was observed when the deposition angle was in the region of 48 degree .
|Number of pages||6|
|Journal||Journal of Japan Society of Lubrication Engineers|
|Publication status||Published - 1982 Jan 1|
ASJC Scopus subject areas