Structure and high-frequency soft-magnetic properties of Co-TiN nano-composite films

Yiwen Zhang; Hanae Kijima; Nobukiyo Kobayashi; Shigehiro Ohnuma; Hiroshi Masumoto

doi:10.2109/jcersj2.121.36

Structure and high-frequency soft-magnetic properties of Co-TiN nano-composite films

Yiwen Zhang, Hanae Kijima, Nobukiyo Kobayashi, Shigehiro Ohnuma, Hiroshi Masumoto

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3GHz. The films have high magnetic loss absorption (P_loss/P_in) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.

Original language	English
Pages (from-to)	36-39
Number of pages	4
Journal	Journal of the Ceramic Society of Japan
Volume	121
Issue number	1409
DOIs	https://doi.org/10.2109/jcersj2.121.36
Publication status	Published - 2013 Jan

Keywords

High frequency permeability
Nano-composite films
Noise suppressor
Soft magnetic property

ASJC Scopus subject areas

Ceramics and Composites
Chemistry(all)
Condensed Matter Physics
Materials Chemistry

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abstract = "The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3GHz. The films have high magnetic loss absorption (Ploss/Pin) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.",

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AU - Masumoto, Hiroshi

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