TY - JOUR
T1 - Structure and high-frequency soft-magnetic properties of Co-TiN nano-composite films
AU - Zhang, Yiwen
AU - Kijima, Hanae
AU - Kobayashi, Nobukiyo
AU - Ohnuma, Shigehiro
AU - Masumoto, Hiroshi
PY - 2013/1
Y1 - 2013/1
N2 - The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3GHz. The films have high magnetic loss absorption (Ploss/Pin) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.
AB - The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3GHz. The films have high magnetic loss absorption (Ploss/Pin) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.
KW - High frequency permeability
KW - Nano-composite films
KW - Noise suppressor
KW - Soft magnetic property
UR - http://www.scopus.com/inward/record.url?scp=84872735288&partnerID=8YFLogxK
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U2 - 10.2109/jcersj2.121.36
DO - 10.2109/jcersj2.121.36
M3 - Article
AN - SCOPUS:84872735288
VL - 121
SP - 36
EP - 39
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
SN - 1882-0743
IS - 1409
ER -