Structure and high-frequency magnetic properties of Co-HfN nanogranular films

Yang Cao, Iun Zuan, S. Ohnuma, N. Kobayashi, Hiroshi Masumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Technological advancement in microelectronic devices has led to an increasing demand for soft-magnetic materials at GHz frequency. The nanogranular film has attracted significant attention as a promising candidate owing to its fruitful properties and simple process. There have been some reports on Co-oxide matrix nanogranular films, which can be used in high-frequency magnetic devices and electromagnetic wave absorbers for down-sized microelectronic devices at GHz frequency [1]. However, the high frequency response of permeability (μ-f) of Co-oxide matrix system is relatively lower than that of theoretical calculation, which is due to easy oxidation of Co. In this study, HfN ceramic has been employed as structural (matrix) phase, considering the good diffusion barrier and chemical stability of HfN [2]. The relationship between the structure and magnetic properties of Co-HfN films was investigated.

Original languageEnglish
Title of host publication2015 IEEE International Magnetics Conference, INTERMAG 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479973224
DOIs
Publication statusPublished - 2015 Jul 14
Event2015 IEEE International Magnetics Conference, INTERMAG 2015 - Beijing, China
Duration: 2015 May 112015 May 15

Publication series

Name2015 IEEE International Magnetics Conference, INTERMAG 2015

Other

Other2015 IEEE International Magnetics Conference, INTERMAG 2015
CountryChina
CityBeijing
Period15/5/1115/5/15

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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