Abstract
Pb(Zr,Ti)O3 (PZT) piezoelectric ceramics with higher Curie temperature Tc are necessary for a fabrication of better micro actuators, sensors, memories and/or piezoelectric micro electromechanical systems(MEMS). New piezoelectric materials with higher Tcbeyond PZT are extensively studied. Among the new piezoelectric materials, Bi(Me)O3-xPbTiO3 ceramics(Me: Yb, In, Sc) are fascinated for the higher Tc materials. In this paper thin films of single crystal (1-x)BiScO3-xPbTiO3 (BS-xPT) were deposited by an rf-magnetron sputtering for a better understanding of ferroelectric performance of the BS-xPT. We have made a laminated composite structure comprising relaxed hetero-epitaxial single crystal thin films of high TcBS-xPT (0.5≤x≤0.8) and SrRuO3(SRO)/Pt/MgO hetero-structural substrates. It was confirmed their ferroelectric performances of the BS-xPT thin films were comparable to the PZT based thin films: a thin film transverse piezoelectricity e31,f was -6.7C/m2 at x=0.8 with 2Pr=∼60μC/cm2, 2Ec=∼250 kV/cm, and ε/εo=∼150. The BS-0.8PT thin films exhibit extraordinary high Tc with Tc=750°C. The enhanced Tc is caused by the presence of the high temperature stable interface in the laminated composite structure. The present BS-xPT thin films have a high potential for a fabrication of high temperature stable piezoelectric MEMS beyond PZT.
Original language | English |
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Title of host publication | 2015 Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 40-43 |
Number of pages | 4 |
ISBN (Print) | 9781479999743 |
DOIs | |
Publication status | Published - 2015 Jul 29 |
Event | Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015 - Singapore, Singapore Duration: 2015 May 24 → 2015 May 27 |
Other
Other | Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015 |
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Country/Territory | Singapore |
City | Singapore |
Period | 15/5/24 → 15/5/27 |
Keywords
- beyond PZT
- BS-xPT thin films
- high Curie temperature
- relaxed single crystal thin films
- sputtered hetero-epitaxial thin films
ASJC Scopus subject areas
- Instrumentation
- Ceramics and Composites
- Electronic, Optical and Magnetic Materials