Structure and electrochemical properties of nitrogen doped diamond-like carbon film synthesized by low temperature neutral beam enhanced chemical vapor deposition

Qiuhe Wang, Xijiang Chang, Yoshiyuki Kikuchi, Kumi Y. Inoue, Tomohiro Kubota, Tomokazu Matsue, Toshihisa Nozawa, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We report nitrogen doping diamond-like carbon film synthesis by a new technique called neutral beam enhanced chemical vapor deposition. The deposition is processed in UV/electron damage-free environment, and the substrate temperature is controlled at room temperature. The film structure was investigated by X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy. The N/C ratio is 0.26, and doped nitrogen atoms exist in forms of amine and inside the aromatic ring, which helps increase film electrical conductivity. Cyclic voltammograms were carried out and the results indicate the DLC: N film qualified as electroanalysis sensor material.

Original languageEnglish
Pages (from-to)1803-1812
Number of pages10
JournalInternational Journal of Electrochemical Science
Volume13
Issue number2
DOIs
Publication statusPublished - 2018

Keywords

  • Cyclic voltammograms
  • DLC film
  • NBECVD

ASJC Scopus subject areas

  • Electrochemistry

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